Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169163 | Detection of surface particles on chamber components with carbon dioxide | Zhili Zuo, Chang Ke, Song-Moon Suh | 2024-12-17 |
| 12094716 | Chambers and coatings for reducing backside damage | Leonard Tedeschi, Kartik Ramaswamy, Benjamin Schwarz, Vahid Firouzdor, Sumanth Banda +1 more | 2024-09-17 |