Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169163 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Zhili Zuo, Song-Moon Suh | 2024-12-17 |
| 12024770 | Methods for selective deposition using self-assembled monolayers | Wenyu Zhang, Liqi Wu | 2024-07-02 |