Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169163 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Zhili Zuo, Chang Ke | 2024-12-17 |
| 11932934 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Adolph Miller Allen, Vaibhav Soni, Kishor Kalathiparambil +1 more | 2024-03-19 |
| 11932950 | Organic contamination free surface machining | Yuanhong Guo, Sheng Guo, Marek Radko, Steven V. Sansoni, Nagendra Madiwal +7 more | 2024-03-19 |