Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027352 | Apparatus for generating magnetic fields on substrates during semiconductor processing | Suhas Bangalore Umesh, Goichi Yoshidome | 2024-07-02 |
| D1026054 | Collimator for a physical vapor deposition (PVD) chamber | Martin Lee Riker, Keith A. Miller, Luke Vianney Varkey, Xiangjin Xie | 2024-05-07 |
| 11932934 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Adolph Miller Allen, Vaibhav Soni, Vanessa Faune +1 more | 2024-03-19 |
| D1009816 | Collimator for a physical vapor deposition chamber | Martin Lee Riker, Keith A. Miller, Fuhong Zhang, Luke Vianney Varkey, Xiangjin Xie | 2024-01-02 |