Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11932934 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Adolph Miller Allen, Vaibhav Soni, Kishor Kalathiparambil +1 more | 2024-03-19 |
| 11935732 | Process kit geometry for particle reduction in PVD processes | Adolph Miller Allen, Kirankumar Neelasandra SAVANDAIAH, Randal Dean Schmieding | 2024-03-19 |