Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136544 | Etch uniformity improvement for single turn internal coil PVD chamber | Anthony Chih-Tung Chan, Mehul Chauhan, Goichi Yoshidome | 2024-11-05 |
| 12112890 | Top magnets for decreased non-uniformity in PVD | Borui Xia, Anthony Chih-Tung Chan, Shiyu YUE, Wei-Sheng Lei, Aravind Kamath +2 more | 2024-10-08 |
| 12094699 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2024-09-17 |
| 11932934 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Vaibhav Soni, Kishor Kalathiparambil, Vanessa Faune +1 more | 2024-03-19 |
| 11935732 | Process kit geometry for particle reduction in PVD processes | Kirankumar Neelasandra SAVANDAIAH, Randal Dean Schmieding, Vanessa Faune | 2024-03-19 |