Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136544 | Etch uniformity improvement for single turn internal coil PVD chamber | Adolph Miller Allen, Mehul Chauhan, Goichi Yoshidome | 2024-11-05 |
| 12112890 | Top magnets for decreased non-uniformity in PVD | Borui Xia, Shiyu YUE, Wei-Sheng Lei, Aravind Kamath, Mukund Sundararajan +2 more | 2024-10-08 |