Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112890 | Top magnets for decreased non-uniformity in PVD | Borui Xia, Anthony Chih-Tung Chan, Shiyu YUE, Wei-Sheng Lei, Aravind Kamath +2 more | 2024-10-08 |
| 12014906 | High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber | William Johanson, Keith A. Miller, Cheng-Hsiung Tsai, John C. Forster | 2024-06-18 |
| 11887878 | Detachable biasable electrostatic chuck for high temperature applications | Shreesha Yogish Rao, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2024-01-30 |