Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887878 | Detachable biasable electrostatic chuck for high temperature applications | Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2024-01-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887878 | Detachable biasable electrostatic chuck for high temperature applications | Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2024-01-30 |