Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165920 | Semiconductor structure and method for forming the same | Hwei-Jay CHU, Chieh-Han Wu, Chung-Ju Lee | 2024-12-10 |
| D1040304 | Deposition ring for physical vapor deposition chamber | David Gunther, Kirankumar Neelasandra SAVANDAIAH | 2024-08-27 |
| 12046551 | Interconnect structure having a barrier layer along the sidewall of self-aligned via structures | Chieh-Han Wu, Chih Wei Lu, Chung-Ju Lee | 2024-07-23 |
| 12014906 | High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber | William Johanson, Keith A. Miller, John C. Forster, Mukund Sundararajan | 2024-06-18 |
| 11961723 | Process kit having tall deposition ring for PVD chamber | David Gunther, Kirankumar Neelasandra SAVANDAIAH | 2024-04-16 |
| 11955362 | Substrate support for reduced damage substrate backside | Joel M. Huston, Gwo-Chuan Tzu | 2024-04-09 |
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Carmen Leal Cervantes, Feng Chen, Lu Chen, Wenjing Xu +4 more | 2024-03-26 |
| 11887878 | Detachable biasable electrostatic chuck for high temperature applications | Shreesha Yogish Rao, Mukund Sundararajan, Manjunatha Koppa, Steven V. Sansoni | 2024-01-30 |