Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Carmen Leal Cervantes, Feng Chen, Wenjing Xu, Aravind Kamath +4 more | 2024-03-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Carmen Leal Cervantes, Feng Chen, Wenjing Xu, Aravind Kamath +4 more | 2024-03-26 |