Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Feng Chen, Lu Chen, Wenjing Xu, Aravind Kamath +4 more | 2024-03-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Feng Chen, Lu Chen, Wenjing Xu, Aravind Kamath +4 more | 2024-03-26 |