Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12157943 | Methods of selective deposition | Wenjing Xu, Gang Shen, Yufei Hu, Tae Hong Ha | 2024-12-03 |
| 12148660 | Low resistance and high reliability metallization module | Roey Shaviv, Suketu Arun Parikh, Lu Chen | 2024-11-19 |
| 11955382 | Reverse selective etch stop layer | Kevin Kashefi, Alexander Jansen, Mehul Naik, He Ren, Lu Chen | 2024-04-09 |
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Carmen Leal Cervantes, Lu Chen, Wenjing Xu, Aravind Kamath +4 more | 2024-03-26 |