Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12157943 | Methods of selective deposition | Wenjing Xu, Gang Shen, Feng Chen, Tae Hong Ha | 2024-12-03 |
| 11967525 | Selective tungsten deposition at low temperatures | Yi Xu, Yu Lei, Kazuya Daito, Da He, Jiajie Cen | 2024-04-23 |
| 11955381 | Low-temperature plasma pre-clean for selective gap fill | Yi Xu, Kazuya Daito, Geraldine VASQUEZ, Da He, Jallepally Ravi +2 more | 2024-04-09 |