Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12152302 | Multiple-channel showerhead design and methods in manufacturing | Kazuya Daito, Harpreet Singh | 2024-11-26 |
| 12016092 | Gas distribution ceramic heater for deposition chamber | Pingyan Lei, Dien-Yeh Wu, Manjunatha Koppa, Ambarish Toorihal, Sandesh Yadamane +2 more | 2024-06-18 |
| 11955319 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Yu Lei, Takashi Kuratomi, Pingyan Lei +1 more | 2024-04-09 |
| 11955381 | Low-temperature plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Kazuya Daito, Geraldine VASQUEZ, Da He +2 more | 2024-04-09 |
| 11939668 | Gas delivery for tungsten-containing layer | Zubin Huang, Mohammed Jaheer SHERFUDEEN, David Santi, Peiqi WANG, Kai WU | 2024-03-26 |
| D1009817 | Shadow ring lift pin | Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Harpreet Singh +1 more | 2024-01-02 |