Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12016092 | Gas distribution ceramic heater for deposition chamber | Pingyan Lei, Jallepally Ravi, Manjunatha Koppa, Ambarish Toorihal, Sandesh Yadamane +2 more | 2024-06-18 |
| D1027120 | Seal for an assembly in a vapor deposition chamber | Yao-Hung YANG, Eric Ruhland, Saurabh M. Chaudhari, Philip Wayne Nagle, Aniruddha Pal +4 more | 2024-05-14 |
| 11955319 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Yu Lei, Takashi Kuratomi, Jallepally Ravi +1 more | 2024-04-09 |
| 11955381 | Low-temperature plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Kazuya Daito, Geraldine VASQUEZ, Da He +2 more | 2024-04-09 |