Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11967525 | Selective tungsten deposition at low temperatures | Yi Xu, Yufei Hu, Yu Lei, Kazuya Daito, Jiajie Cen | 2024-04-23 |
| 11955381 | Low-temperature plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Kazuya Daito, Geraldine VASQUEZ, Jallepally Ravi +2 more | 2024-04-09 |