Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11967525 | Selective tungsten deposition at low temperatures | Yufei Hu, Yu Lei, Kazuya Daito, Da He, Jiajie Cen | 2024-04-23 |
| 11955319 | Processing chamber with multiple plasma units | Kazuya Daito, Yu Lei, Takashi Kuratomi, Jallepally Ravi, Pingyan Lei +1 more | 2024-04-09 |
| 11955381 | Low-temperature plasma pre-clean for selective gap fill | Yufei Hu, Kazuya Daito, Geraldine VASQUEZ, Da He, Jallepally Ravi +2 more | 2024-04-09 |
| 11948836 | Deposition of metal films with tungsten liner | Yu Lei, Sang-Hyeob Lee, Chris Pabelico, Tae Hong Ha, Xianmin Tang +1 more | 2024-04-02 |