Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062567 | Systems and methods for substrate support temperature control | Rui Cheng, Diwakar Kedlaya, Satish Radhakrishnan, Anton Baryshnikov, Venkatanarayana Shankaramurthy +3 more | 2024-08-13 |
| 11981998 | Systems and methods for substrate support temperature control | Rui Cheng, Jian Li | 2024-05-14 |
| 11961739 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Karthik Janakiraman, Diwakar Kedlaya +1 more | 2024-04-16 |
| 11939668 | Gas delivery for tungsten-containing layer | Mohammed Jaheer SHERFUDEEN, David Santi, Jallepally Ravi, Peiqi WANG, Kai WU | 2024-03-26 |
| 11939675 | Apparatus and methods for improving thermal chemical vapor deposition (CVD) uniformity | Rui Cheng, Karthik Janakiraman | 2024-03-26 |
| D1009817 | Shadow ring lift pin | Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Jallepally Ravi, Harpreet Singh +1 more | 2024-01-02 |