Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062567 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng, Diwakar Kedlaya, Anton Baryshnikov, Venkatanarayana Shankaramurthy +3 more | 2024-08-13 |
| 12043895 | Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors | Alexander Lerner, Prashanth Kothnur, Roey Shaviv | 2024-07-23 |
| 11970775 | Showerhead for providing multiple materials to a process chamber | Prashanth Kothnur, Alexander Lerner, Sergei Klimovich, Roey Shaviv | 2024-04-30 |