Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062567 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng, Satish Radhakrishnan, Anton Baryshnikov, Venkatanarayana Shankaramurthy +3 more | 2024-08-13 |
| 11961739 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Karthik Janakiraman, Zubin Huang +1 more | 2024-04-16 |
| 11939674 | Methods to reduce material surface roughness | Yi Yang, Krishna Nittala, Karthik Janakiraman, Aykut Aydin | 2024-03-26 |
| 11862475 | Gas mixer to enable RPS purging | Fang Ruan, Amit Kumar BANSAL, Venkata Sharat Chandra Parimi, Rajaram Narayanan, Badri Narayan Ramamurthi +3 more | 2024-01-02 |