Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062567 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng, Diwakar Kedlaya, Satish Radhakrishnan, Anton Baryshnikov +3 more | 2024-08-13 |
| 12012653 | Cleaning assemblies for substrate processing chambers | Yuxing Zhang, Tuan Nguyen, Amit Kumar BANSAL, Nitin Pathak, Saket Rathi +3 more | 2024-06-18 |
| 11952663 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Nitin Pathak, Tuan Nguyen, Amit Kumar BANSAL, Thomas Rubio, Juan Carlos Rocha-Alvarez | 2024-04-09 |
| 11862475 | Gas mixer to enable RPS purging | Fang Ruan, Diwakar Kedlaya, Amit Kumar BANSAL, Venkata Sharat Chandra Parimi, Rajaram Narayanan +3 more | 2024-01-02 |