Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183553 | Baffle implementation for improving bottom purge gas flow uniformity | Kartik Shah, Amit Kumar BANSAL, Tuan Nguyen, Juan Carlos Rocha, David Blahnik | 2024-12-31 |
| 12012653 | Cleaning assemblies for substrate processing chambers | Yuxing Zhang, Tuan Nguyen, Amit Kumar BANSAL, Saket Rathi, Thomas Rubio +3 more | 2024-06-18 |
| 11952660 | Semiconductor processing chambers and methods for cleaning the same | Yuxing Zhang, Tuan Nguyen, Kalyanjit Ghosh, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez | 2024-04-09 |
| 11952663 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Tuan Nguyen, Amit Kumar BANSAL, Badri Narayan Ramamurthi, Thomas Rubio, Juan Carlos Rocha-Alvarez | 2024-04-09 |