Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12012653 | Cleaning assemblies for substrate processing chambers | Yuxing Zhang, Tuan Nguyen, Amit Kumar BANSAL, Nitin Pathak, Saket Rathi +3 more | 2024-06-18 |
| 11952663 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Nitin Pathak, Tuan Nguyen, Amit Kumar BANSAL, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2024-04-09 |