Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12012653 | Cleaning assemblies for substrate processing chambers | Yuxing Zhang, Tuan Nguyen, Amit Kumar BANSAL, Nitin Pathak, Thomas Rubio +3 more | 2024-06-18 |
| 11961756 | Vented susceptor | Uday Kiran Rokkam, Sam Kim, Dakai Bian | 2024-04-16 |
| 11946137 | Runout and wobble measurement fixtures | Aniket PATIL, Sam Kim, Shiva K.T. Rajavelu Muralidhar | 2024-04-02 |