Issued Patents 2024
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183559 | Apparatus for temperature control in a substrate processing chamber | Vishwas Kumar Pandey, Colin John Dickinson, Dinkesh HUDERI SOMANNA, Ala Moradian | 2024-12-31 |
| 12183553 | Baffle implementation for improving bottom purge gas flow uniformity | Nitin Pathak, Amit Kumar BANSAL, Tuan Nguyen, Juan Carlos Rocha, David Blahnik | 2024-12-31 |
| 12139790 | Processing system and method of delivering a reactant gas | Vishwas Kumar Pandey, Christopher S. Olsen, Rene George, Eric Kihara Shono, Lara Hawrylchak +3 more | 2024-11-12 |
| 12091749 | Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Manjunath Subbanna, Ala Moradian +4 more | 2024-09-17 |
| 12060651 | Chamber architecture for epitaxial deposition and advanced epitaxial film applications | Tetsuya Ishikawa, Swaminathan Srinivasan, Ala Moradian, Manjunath Subbanna, Matthias Bauer +2 more | 2024-08-13 |
| D1037778 | Gas distribution plate | Ashutosh Agarwal, Eric J. Hoffmann, Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Sanjeev Baluja | 2024-08-06 |
| 12018372 | Gas injector for epitaxy and CVD chamber | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Ala Moradian, Manjunath Subbanna +4 more | 2024-06-25 |
| 12001197 | Eco-efficiency (sustainability) dashboard for semiconductor manufacturing | Ala Moradian, Elizabeth Neville, Umesh M. Kelkar, Mark Denome, Prashanth Kothnur +3 more | 2024-06-04 |
| 11978646 | Thermal chamber with improved thermal uniformity | Dongming Iu, Norman L. Tam, Matthew Spuller, Jau-Jiun CHEN, Kong CHAN +4 more | 2024-05-07 |
| 11959169 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Tobin Kaufman-Osborn +3 more | 2024-04-16 |
| 11885021 | Gas supply member with baffle | Vishwas Kumar Pandey, Kailash Pradhan, Sairaju Tallavarjula, Rene George, Eric Kihara Shono +2 more | 2024-01-30 |