Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183559 | Apparatus for temperature control in a substrate processing chamber | Colin John Dickinson, Dinkesh HUDERI SOMANNA, Ala Moradian, Kartik Shah | 2024-12-31 |
| 12139790 | Processing system and method of delivering a reactant gas | Christopher S. Olsen, Rene George, Eric Kihara Shono, Lara Hawrylchak, Erika HANSEN +3 more | 2024-11-12 |
| D1023987 | Chamber inlet | Eric Kihara Shono, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2024-04-23 |
| 11959169 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Christopher S. Olsen, Kartik Shah, Hansel LO, Tobin Kaufman-Osborn +3 more | 2024-04-16 |
| 11885021 | Gas supply member with baffle | Kartik Shah, Kailash Pradhan, Sairaju Tallavarjula, Rene George, Eric Kihara Shono +2 more | 2024-01-30 |