Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12139790 | Processing system and method of delivering a reactant gas | Vishwas Kumar Pandey, Christopher S. Olsen, Rene George, Eric Kihara Shono, Lara Hawrylchak +3 more | 2024-11-12 |
| 11996305 | Selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Chaitanya A. PRASAD, Christopher S. Olsen, Lara Hawrylchak, Daniel C. Glover, Naman Apurva +1 more | 2024-05-28 |
| 11959169 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO +3 more | 2024-04-16 |