| 12139790 |
Processing system and method of delivering a reactant gas |
Vishwas Kumar Pandey, Rene George, Eric Kihara Shono, Lara Hawrylchak, Erika HANSEN +3 more |
2024-11-12 |
| 12086709 |
Machine-learning based system for virtual flow metering |
Douglas Hakkarinen, Christopher Zaremba, Everett D. Robinson, Morgan Cowee, R. James Provost |
2024-09-10 |
| 11996305 |
Selective oxidation on rapid thermal processing (RTP) chamber with active steam generation |
Chaitanya A. PRASAD, Lara Hawrylchak, Erika HANSEN, Daniel C. Glover, Naman Apurva +1 more |
2024-05-28 |
| D1023987 |
Chamber inlet |
Eric Kihara Shono, Vishwas Kumar Pandey, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more |
2024-04-23 |
| 11959169 |
Asymmetric injection for better wafer uniformity |
Eric Kihara Shono, Vishwas Kumar Pandey, Kartik Shah, Hansel LO, Tobin Kaufman-Osborn +3 more |
2024-04-16 |
| 11948791 |
Steam oxidation initiation for high aspect ratio conformal radical oxidation |
Taewan Kim |
2024-04-02 |
