Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12110585 | Process chamber and exhaust liner system therefor | Lara Hawrylchak, Mahesh Ramakrishna, Sriharish Srinivasan, Prashant Agarwal | 2024-10-08 |
| 11996305 | Selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Chaitanya A. PRASAD, Christopher S. Olsen, Lara Hawrylchak, Erika HANSEN, Daniel C. Glover +1 more | 2024-05-28 |