Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12110585 | Process chamber and exhaust liner system therefor | Naman Apurva, Lara Hawrylchak, Sriharish Srinivasan, Prashant Agarwal | 2024-10-08 |
| D1035598 | Gas distribution plate for a semiconductor processing chamber | Yury Shustrov | 2024-07-16 |