Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165907 | Apparatus for rotating substrates | Giridhar Kamesh, Vinodh Ramachandran, Mohammad Aamir, Daniel C. Glover | 2024-12-10 |
| 11996305 | Selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Christopher S. Olsen, Lara Hawrylchak, Erika HANSEN, Daniel C. Glover, Naman Apurva +1 more | 2024-05-28 |
| 11990321 | Fast response pedestal assembly for selective preclean | Lara Hawrylchak | 2024-05-21 |