Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183559 | Apparatus for temperature control in a substrate processing chamber | Vishwas Kumar Pandey, Colin John Dickinson, Ala Moradian, Kartik Shah | 2024-12-31 |
| 11981989 | Automated temperature controlled substrate support | Robert Hartwig, Brian T. West | 2024-05-14 |