Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183559 | Apparatus for temperature control in a substrate processing chamber | Vishwas Kumar Pandey, Colin John Dickinson, Dinkesh HUDERI SOMANNA, Kartik Shah | 2024-12-31 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Flora Fong-Song CHANG, Vilen K. NESTOROV +10 more | 2024-12-10 |
| 12091749 | Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Manjunath Subbanna, Kartik Shah +4 more | 2024-09-17 |
| 12060651 | Chamber architecture for epitaxial deposition and advanced epitaxial film applications | Tetsuya Ishikawa, Swaminathan Srinivasan, Kartik Shah, Manjunath Subbanna, Matthias Bauer +2 more | 2024-08-13 |
| 12018372 | Gas injector for epitaxy and CVD chamber | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Manjunath Subbanna, Kartik Shah +4 more | 2024-06-25 |
| 12001197 | Eco-efficiency (sustainability) dashboard for semiconductor manufacturing | Elizabeth Neville, Umesh M. Kelkar, Mark Denome, Prashanth Kothnur, Karthik Ramanathan +3 more | 2024-06-04 |
| 11860973 | Method and system for foreline deposition diagnostics and control | Martin A. Hilkene, Zuoming ZHU, Errol Antonio C. Sanchez, Bindusagar Marath Sankarathodi, Patricia M. Liu +1 more | 2024-01-02 |