Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163229 | Multi zone spot heating in EPI | Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye, Joseph M. Ranish +3 more | 2024-12-10 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG, Vilen K. NESTOROV +10 more | 2024-12-10 |
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Brian H. Burrows, Lori D. Washington, Herman Diniz, Martin A. Hilkene +4 more | 2024-07-16 |
| 12033874 | EPI chamber with full wafer laser heating | Adel George Tannous, Patrick C. Genis, Zhiyuan Ye | 2024-07-09 |