Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072267 | Method and hardware for post maintenance vacuum recovery system | — | 2024-08-27 |
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Shu-Kwan LAU, Brian H. Burrows, Lori D. Washington, Herman Diniz +4 more | 2024-07-16 |
| 11860973 | Method and system for foreline deposition diagnostics and control | Ala Moradian, Zuoming ZHU, Errol Antonio C. Sanchez, Bindusagar Marath Sankarathodi, Patricia M. Liu +1 more | 2024-01-02 |