Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Shu-Kwan LAU, Lori D. Washington, Herman Diniz, Martin A. Hilkene +4 more | 2024-07-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Shu-Kwan LAU, Lori D. Washington, Herman Diniz, Martin A. Hilkene +4 more | 2024-07-16 |