Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163229 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zhiyuan Ye, Joseph M. Ranish +3 more | 2024-12-10 |
| 12165934 | Substrate processing monitoring | Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG, Vilen K. NESTOROV +10 more | 2024-12-10 |
| 11860973 | Method and system for foreline deposition diagnostics and control | Ala Moradian, Martin A. Hilkene, Errol Antonio C. Sanchez, Bindusagar Marath Sankarathodi, Patricia M. Liu +1 more | 2024-01-02 |