Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163229 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2024-12-10 |
| 11945045 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2024-04-02 |
| 11942381 | System for non radial temperature control for rotating substrates | Wolfgang Aderhold, Aaron Muir Hunter | 2024-03-26 |