Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176242 | Rotatable thermal processing chamber | Dongming Iu | 2024-12-24 |
| 12169098 | RTP substrate temperature one for all control algorithm | Yi-Cheng Wang | 2024-12-17 |
| 12159797 | Pyrometry error detection sensor for RTP temperature control system | Samuel C. Howells, Amritha Rammohan, Huy Q. Nguyen | 2024-12-03 |
| 12085965 | Systems, methods, and apparatus for correcting thermal processing of substrates | Abhilash J. Mayur, Yi-Cheng Wang | 2024-09-10 |
| 12080573 | Temperature offset and zone control tuning | Ole LUCKNER, Shankar Muthukrishnan | 2024-09-03 |
| 11942381 | System for non radial temperature control for rotating substrates | Aaron Muir Hunter, Joseph M. Ranish | 2024-03-26 |
| 11942345 | Automated substrate placement to chamber center | — | 2024-03-26 |
| 11915953 | Apparatus, systems, and methods of measuring edge ring distance for thermal processing chambers | Ole LUCKNER | 2024-02-27 |