Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085965 | Systems, methods, and apparatus for correcting thermal processing of substrates | Wolfgang Aderhold, Yi-Cheng Wang | 2024-09-10 |
| 11978646 | Thermal chamber with improved thermal uniformity | Dongming Iu, Kartik Shah, Norman L. Tam, Matthew Spuller, Jau-Jiun CHEN +4 more | 2024-05-07 |
| 11945045 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Aaron Muir Hunter +2 more | 2024-04-02 |
| 11859277 | Catalyst enhanced molybdenum deposition and gap fill | Xi Cen, Kai Wu, Seshadri Ganguli, Xinming Zhang, Norman L. Tam | 2024-01-02 |