Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978646 | Thermal chamber with improved thermal uniformity | Dongming Iu, Kartik Shah, Norman L. Tam, Matthew Spuller, Kong CHAN +4 more | 2024-05-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978646 | Thermal chamber with improved thermal uniformity | Dongming Iu, Kartik Shah, Norman L. Tam, Matthew Spuller, Kong CHAN +4 more | 2024-05-07 |