Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978646 | Thermal chamber with improved thermal uniformity | Dongming Iu, Kartik Shah, Matthew Spuller, Jau-Jiun CHEN, Kong CHAN +4 more | 2024-05-07 |
| 11901195 | Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation | Pradeep SAMPATH KUMAR, Dongming Iu, Shashank Sharma, Eric Rieske, Michael P. KAMP | 2024-02-13 |
| 11859277 | Catalyst enhanced molybdenum deposition and gap fill | Xi Cen, Kai Wu, Seshadri Ganguli, Xinming Zhang, Abhilash J. Mayur | 2024-01-02 |