Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Flora Fong-Song CHANG, Vilen K. NESTOROV +10 more | 2024-12-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Flora Fong-Song CHANG, Vilen K. NESTOROV +10 more | 2024-12-10 |