Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131105 | Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing | Preetham Rao | 2024-10-29 |
| 12043895 | Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors | Alexander Lerner, Roey Shaviv, Satish Radhakrishnan | 2024-07-23 |
| 12001197 | Eco-efficiency (sustainability) dashboard for semiconductor manufacturing | Ala Moradian, Elizabeth Neville, Umesh M. Kelkar, Mark Denome, Karthik Ramanathan +3 more | 2024-06-04 |
| 11970775 | Showerhead for providing multiple materials to a process chamber | Satish Radhakrishnan, Alexander Lerner, Sergei Klimovich, Roey Shaviv | 2024-04-30 |