Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12043895 | Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors | Prashanth Kothnur, Roey Shaviv, Satish Radhakrishnan | 2024-07-23 |
| 11970775 | Showerhead for providing multiple materials to a process chamber | Prashanth Kothnur, Satish Radhakrishnan, Sergei Klimovich, Roey Shaviv | 2024-04-30 |