Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148660 | Low resistance and high reliability metallization module | Suketu Arun Parikh, Feng Chen, Lu Chen | 2024-11-19 |
| 12043895 | Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors | Alexander Lerner, Prashanth Kothnur, Satish Radhakrishnan | 2024-07-23 |
| 11970775 | Showerhead for providing multiple materials to a process chamber | Prashanth Kothnur, Satish Radhakrishnan, Alexander Lerner, Sergei Klimovich | 2024-04-30 |
| 11948885 | Methods and apparatus for forming dual metal interconnects | Suketu Arun Parikh, Rong Tao, Joung Joo Lee, Seshadri Ganguli, Shirish A. PETHE +3 more | 2024-04-02 |