Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131105 | Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing | Prashanth Kothnur | 2024-10-29 |
| 11978646 | Thermal chamber with improved thermal uniformity | Dongming Iu, Kartik Shah, Norman L. Tam, Matthew Spuller, Jau-Jiun CHEN +4 more | 2024-05-07 |