Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183559 | Apparatus for temperature control in a substrate processing chamber | Vishwas Kumar Pandey, Dinkesh HUDERI SOMANNA, Ala Moradian, Kartik Shah | 2024-12-31 |
| 12170192 | Plasma abatement system utilizing water vapor and oxygen reagent | — | 2024-12-17 |