Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183618 | Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool | Sanjeev Baluja, Tejas Ulavi, Eric J. Hoffmann | 2024-12-31 |
| 12060638 | Deposition apparatus and methods using staggered pumping locations | Joseph AuBuchon, Sanjeev Baluja | 2024-08-13 |
| 12057333 | Metrology slot plates | Kenneth Brian Doering, Vivek Shah, Sanjeev Baluja, Shrihari Sampathkumar, Chunlei Zhang | 2024-08-06 |
| D1037778 | Gas distribution plate | Eric J. Hoffmann, Dhritiman Subha Kashyap, Kartik Shah, Amit Rajendra Sherekar, Sanjeev Baluja | 2024-08-06 |
| 12018376 | Apparatus and methods for motor shaft and heater leveling | Tejas Ulavi, Sanjeev Baluja | 2024-06-25 |
| 11955361 | Electrostatic chuck with mesas | Vijay D. Parkhe | 2024-04-09 |
| 11932939 | Lids and lid assembly kits for atomic layer deposition chambers | Muhammad M. Rasheed, Srinivas Gandikota, Mario D. Sanchez, Guoqiang Jian, Yixiong Yang +1 more | 2024-03-19 |
| 11857647 | Pharmaceutical composition comprising tetrofosmin and pharmaceutically acceptable salts thereof | Umamaheshwar M. Prasad, Harmik Sohi, Rahul Hasija, Dinesh Kumar, Kamal S. Mehta +2 more | 2024-01-02 |